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WebJul 17, 2014 · Danish Micro Engineering A/S (Denmark) Delong America (Canada) FEI Company (USA) Hirox Asia Ltd. (Hong Kong) Hirox Europe Ltd. (France) Hitachi High-Technologies America, Inc. (USA) WebIEEE June 5, 2015. Abstract—In this paper, a three-dimensional atomic force. microscope (3DAFM) for imaging of the micro- and nanoscale. sidewall structures is presented. The system mainly consists of. two individual scanners, each with two degrees of freedom to. drive the probe on Y-Z plane for the feedback control and the. popular free vr games
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